Vacuum Chucks
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Vacuum Chucks & Plates


Two Zone Chuck 300mm and 200mm
  • Additional Zones Can Be Added
  • Optional lift pin holes
  • Run 300mm or 200mm Wafers on the same chuck
  • Custom made to meet customers specification
After cleaning, ready for packing and shipping

Dicing Chucks

 
    • 300 or 400 Series Stainless Steel Base
    • Highest grade ceramic inserts
    • Flatness and tolerances equal to or better than OEM
    • Two year workmanship warranty
    • Custom dicing chucks available
    • Can be refurbished.
    • 100% Money back guarantee
 

 
 

Replacement Wafer Dicing Vacuum Chucks


Redesigned for longer life our chucks use superior ceramic materials. Flatness equal to, and in many cases exceeding, the OEM product.

We supply chucks for:

  • Accretech
  • Applied Materials
  • ADT
  • K & S
  • Disco
  • Micro Automation
  • Okomoto
  • Strasbaugh
  • Shuwa...

and many others.

 

We can re-design a chuck for you based on a worn-out sample from the OEM.

Ceramic Base with

Porous Ceramic Insert


We produce a wide variety of ceramic in ceramic chucks in all sizes for a full range of grinding and lapping equipment. Please contact SVR to talk about your requirements.

 

  • Highest grade ceramic available
  • Flatness and tolerances equal to or better than OEM
  • Two year workmanship warranty
  • Custom chucks available
  • Made in the USA
  • 100% Money back guarantee


    Chuck shown in for a Okamoto grinder 
    Model VG-502MKII-8 Chuck has been
    redesigned to give a longer life than
    OEM

 

Custom Vacuum Chucks

Metal base with solid ceramic pellet and porous ceramic insert.

 

Grinding Chucks

  • Spin Coating Chucks
  • Delrin Based with Ceramic Inserts
  • Raw Porous Ceramic Plate Cut to Size
  • Quartz Plate Vacuum Chucks
  • Steel Plate Vacuum Chucks